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DESCRIPTION |
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The Model SL-700 Series Ultrasonic Micromeasurement System is an ideal solution for the detection and measurement of ultra pure chemical fluids in the semiconductor industries using very small sensor (VSS) technology. Measuring a fluid level accurately and reliably in the chemical vapor deposition process is of the utmost importance to the semiconductor wafer fabrication process. The Measurement Specialties SL-700 Series provides a continuous transmitter with a very high degree of precision. The SL-700 Series ultrasonic system is well suited for high viscosity liquids such as DMAH, titanium precursors and copper precursors.
FEATURES APPLICATIONS
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? 316 LSS machine body sensor |
? Semiconductor industries |
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? Sensor material finish 10μin RA electropolished |
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? Miniature sensor size reduces liquid volume displacement ? Works with the following chemicals independent |
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of dielectric, viscosity, color, density and opacity of chemical fluids: DMAH, TAETO, CVD, TDEAT, CUTMUS, TEOS, DCE, TCA ? High pressure vessel application up to 250 |
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PSIG (1724 Kpa) (consult factory for higher pressure applications) |
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? Accuracy of continuous level transmitter ±0.01 in (0.25 mm) or better ? Continuous transmitter output, 4-20 mA, 1-10 V, |
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RS-232, remote unit with digital display, two alarm |
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美國精量電子MEAS超聲波液位計SL-700
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Parameter |
Typical Value |
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Repeatability |
±0.005 in (0.127 mm) typical |
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Input Power |
VDC, 115 VAC/230VAC, 50/60 Hz (optional) |
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Output |
Continuous 4-20 mA. 0-5 V or 0-10 V, RS 232 PC compatible, bidirectional communication, two alarm |
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Housing |
NEMA 1; NEMA-4X (stainless steel) optional |
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Range |
to 10 in (25.4 to 254 mm) (consult factory for longer range |
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Parameter |
Typical Value |
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Mounting |
?’ M VCR, ?” F VCR |
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Sensor Material |
LSS (standard) |
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Operating Pressure |
Up to 250 PSIG (1724 Kpa) |
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Temperature |
Sensor: -20 to 200 °F (-29 to 93 °C) Electronics: -20 to 170 °F (-29 to 77 °C) |
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MECHANICAL DIMENSIONS |
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in inches [mm] |
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美國精量電子MEAS超聲波液位計SL-700
Figure 1: SL-700 series elements electronic module
